Abstract: It has been revealed that materials and structures on the micro and nanometer scale demonstrate many characteristics different from their macro dimensions. Nanotechnology has become a hot topic in current research and industrial applications. Miniaturisation relies on functional structures and devices of micro and nanometer dimensions. An overview is presented of micro/nanofabrication technologies which are the basis for the realisation of micro and nanoscale structures. A brief description of the difference between such fabrication and conventional machining is given, and a few principles on how to choose an appropriate micro/nanofabrication technology for a specific application are suggested. Current challenges are presented, together with a prediction of future developments.