纳米器件的制备、表征及其应用

Characterization and development of nanodevices

摘要: 利用建立的常规光刻法的纳米加工工艺系统，研制碳纳米管晶体管、单电子晶体管和单电子晶体集成的纳米器件.研制出了90K的单电子晶体管，实现了两单电子晶体管的电容耦合集成、多个单电子晶体管的串联集成以及单电子晶体管与传统器件的集成.

Abstract: The fabrication of carbon nanotube field-effect transistors, single-electron transistors and their integrated circuits is reported. A single-electron transistor has been successfully fabricated which can operate to 90K. Integration of two single-electron transistors by capacitive coupling has been realized. Integration of a series of single-electron transistors as well as a single-electron transistor to a high electron mobility transistor has been achieved.